@InProceedings{SilvaUedaMell:2016:EvTeBe,
author = "Silva, Carla da and Ueda, M{\'a}rio and Mello, Carina Barros",
affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and {Instituto
Nacional de Pesquisas Espaciais (INPE)} and {Instituto Nacional de
Pesquisas Espaciais (INPE)}",
title = "Evaluation of temperature behavior in diferent configurations of
hollow cathodes to be used in plasma immersion ion implantation",
year = "2016",
organization = "Congresso Brasileiro de Aplica{\c{c}}{\~o}es de V{\'a}cuo na
Ind{\'u}stria e na Ci{\^e}ncia, 38. (CBrAVIC)",
conference-location = "Bauru, SP",
conference-year = "09-12 out.",
language = "en",
targetfile = "silva_evaluation.pdf",
urlaccessdate = "28 abr. 2024"
}